Cantilever magnetoelectric PZT/Tb–Fe–Co resonators for magnetic sensing applications
نویسندگان
چکیده
Magnetoelectric material-based cantilever resonators have been considered as a promising solution for magnetic sensing applications. However, most applications focus on bulk piezoelectric (e.g., PZT) laminated composites, which put critical limit miniaturizing into micrometer-sized devices. This work aims at demonstrating the potential of micro-resonator approach with lower power consumption and smaller size. It reports fabrication characterization resonant based freestanding multi-ferroic PZT/Tb–Fe–Co thin film multilayer, where signal is sensed by measuring shift device frequency. The Tb–Fe–Co layer acts field layer, while PZT integrated in capacitor geometry micro-transducer to obtain an electrical signal. For less than 0.2 T, sensitivity high 487 Hz/T measured sensor under vacuum environment. While design has be further optimized improve performance, it micro-magnetoelectric sensing.
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ژورنال
عنوان ژورنال: APL Materials
سال: 2021
ISSN: ['2166-532X']
DOI: https://doi.org/10.1063/5.0042379